A novel wireless gas sensor based on LTCC technology
A novel wireless gas sensor based on LTCC technology
复制标题
一种基于LTCC技术的新型无线气体传感器
DOI：
10.1016/j.snb.2016.08.073
复制
发表时间：
2017-02-01
影响因子：
8.4
通讯作者：
Li, Yongxiang
中科院分区：
文献类型：
--
作者：
Ma, Mingsheng;Khan, Hareem;Li, Yongxiang
这项工作展示了基于使用低温共烧陶瓷 (LTCC) 技术的谐振天线电路的高选择性无线 NO2 气体传感器的开发。基于无线 LTCC 的气体传感器由平面电感器-叉指电容器 (LC) 谐振天线组成，该天线采用二维 (2D)SnS2 纳米薄片作为模型 NO2 气体选择性材料。详细描述了 LTCC 平台的制造，简要描述了气敏材料的特性，并最终研究了 NO2 气体传感系统的操作。 LTCC 模板的响应与其电阻和电容的变化相关，这是由于 NO2 气体分子物理吸附到其表面而导致 2D SnS2 的特性发生变化。展示了不同工作温度和 NO2 气体浓度下的无线气体传感性能。所获得的LC气体传感器成功用于大气气体背景中浓度低于0.6 ppm的NO2的无线传感。所开发的技术对于建立适用于恶劣环境的无线气体传感器有着巨大的前景 (C) 2016 Elsevier B.V. 保留所有权利。
This work presents the development of a highly selective wireless NO2 gas sensor based on a resonant antenna circuit using a low temperature co-fired ceramic (LTCC) technique. The wireless LTCC based gas sensor consists of a planar inductor-interdigital capacitor (LC) resonant antenna, which incorporates two dimensional (2D)SnS2 nanoflakes as a model NO2 gas selective material. The fabrication of the LTCC platform is fully described, a brief description on the characterization of the gas sensitive material is presented and eventually the operation of the system for the sensing of NO2 gas is investigated. The response of the LTCC template was associated to the changes of its resistance and capacitance due to the alterations in the properties of 2D SnS2 as a result of physical adsorption of NO2 gas molecules onto its surface. The wireless gas sensing performance under different operating temperatures and NO2 gas concentrations are presented. The obtained LC gas sensor is successfully used for the wireless sensing of NO2 in the background of atmospheric gas at concentrations lower than 0.6 ppm. The developed technology has a great promise for establishing wireless gas sensors for harsh environments (C) 2016 Elsevier B.V. All rights reserved.