Micromechanically based integrated optic modulators and switches
Micromechanically based integrated optic modulators and switches
复制标题
基于微机械的集成光调制器和开关
DOI：
10.1117/12.141215
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发表时间：
1993
期刊：
影响因子：
--
通讯作者：
N. Hartman
中科院分区：
文献类型：
--
作者：
Y. W. Kim;M. Allen;N. Hartman
将微机械加工器件集成到集成光学系统中为这些系统的小型化和改进性能提供了潜力。本文描述了一种与光波导集成的机电开关，该开关适用于相位和强度调制，从而实现调制或开关功能。机电开关是使用表面微机械加工技术制造的，由多层聚酰亚胺平台组成，其中一些区域悬浮在波导表面上方2 - 3微米，其他区域悬浮在波导表面上方15微米。平台可以在垂直方向上自由移动。在平台和衬底之间施加电压使平台与波导紧密接触，从而改变波导传输特性。很容易设想将这种技术扩展到串联的多个平台以创建多位数字调制。
The integration of micromachined devices into integrated optic systems offers the potential for both miniaturization and improved performance of these systems. In this paper, an electromechanical switch integrated with an optical waveguide is described that is suitable for phase and intensity modulation and thus modulation or switching functions. The electromechanical switch is fabricated using surface micromachining techniques and consists of a multilevel polyimide platform, some regions of which are suspended 2 - 3 micrometers above the waveguide surface and other region 15 micrometers above the waveguide surface. The platform is free to move in the vertical direction. Application of voltage between the platform and substrate brings the platform into intimate contact with the waveguide, thus changing the waveguide transmission characteristics. Extensions of this technique to multiple platforms in series to create multibit digital modulation is easily envisioned.