Time-Resolved Observation of Deposition Process of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films in Pulsed Laser Deposition

Time-Resolved Observation of Deposition Process of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films in Pulsed Laser Deposition
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脉冲激光沉积超纳米晶金刚石/氢化非晶碳复合薄膜沉积过程的时间分辨观测

DOI:
10.1155/2009/901241
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发表时间:
2009
影响因子:
--
通讯作者:
K. Nagayama
K. Nagayama
中科院分区:
材料科学4区
文献类型:
--
作者:
K. Hanada;T. Nishiyama;T. Yoshitake;K. Nagayama

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使用光学发射光谱研究氢气气氛中石墨的脉冲激光烧蚀,其中超纳米晶金刚石(UNCD)/氢化非晶碳(a-C:H)复合膜在加热的基底上生长。使用配备窄带通滤光片的高速 ICCD 相机拍摄从激光照射点向基底扩展的羽流的时间分辨照片。虽然 C 原子和 C2 二聚体的发射持续在目标上的激光照射点之上,但 C 原子的发射
Optical emission spectroscopy was used to study pulsed laser ablation of graphite in a hydrogen atmosphere wherein ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films were grown on heated substrates. Time-resolved photographs of a plume that expanded from a laser-irradiation spot toward a substrate were taken using a high-speed ICCD camera equipped with narrow-bandpass filters. While the emissions from C atoms and C2 dimers lasted above the laser-irradiation spot on the target, the emission from C
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