Thin Film Polycrystalline Silicon Nanowire Biosensors
Thin Film Polycrystalline Silicon Nanowire Biosensors
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DOI：
10.1021/nl2042276
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发表时间：
2012-04-01
期刊：
影响因子：
10.8
通讯作者：
Ashburn, Peter
中科院分区：
文献类型：
--
作者：
Hakim, Mohammad M. A.;Lombardini, Marta;Ashburn, Peter
多晶硅纳米线生物传感器是一种自顶向下的生物传感器，被用来测定两种炎症生物标志物的结合常数。基于简单和成熟的光刻、薄膜技术和等离子体刻蚀，开发了一种非常低成本的纳米制造工艺，使其能够轻松实现大规模生产。抗体功能化的纳米线传感器被用来在广泛的浓度范围内检测蛋白质白介素8(IL-8)和肿瘤坏死因子-α(TNF-α)，表现出良好的灵敏度和选择性，例如在存在超过100000倍的非目标蛋白质的情况下，检测灵敏度为10fM。纳米线滴定曲线给出的抗体抗原解离常数与低盐酶联免疫吸附试验(ELISA)一致。这种制造工艺生产出适合低成本大规模生产的高质量纳米线，为实现一次性纳米电子护理点(PoC)设备提供了一条现实的途径。
Polysilicon nanowire biosensors have been fabricated using a top-down process and were used to determine the binding constant of two inflammatory biomarkers. A very low cost nanofabrication process was developed, based on simple and mature photolithography, thin film technology, and plasma etching, enabling an easy route to mass manufacture. Antibody-functionalized nanowire sensors were used to detect the proteins interleukin-8 (IL-8) and tumor necrosis factor-alpha (TNF-alpha) over a wide range of concentrations, demonstrating excellent sensitivity and selectivity, exemplified by a detection sensitivity of 10 FM in the presence of a 100 000-fold excess of a nontarget protein. Nanowire titration curves gave antibody antigen dissociation constants in good agreement with low-salt enzyme-linked immunosorbent assays (ELISAs). This fabrication process produces high-quality nanowires that are suitable for low-cost mass production, providing a realistic route to the realization of disposable nanoelectronic point-of-care (PoC) devices.