Epitaxial DyScO3 films as passivation layers suppress the diffusion of oxygen vacancies in SrTiO3
Epitaxial DyScO3 films as passivation layers suppress the diffusion of oxygen vacancies in SrTiO3
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DOI：
10.1088/0022-3727/43/2/025301
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发表时间：
2010-01
期刊：
影响因子：
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通讯作者：
G. Yuan;K. Nishio;M. Lippmaa;A. Uedono
中科院分区：
文献类型：
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作者：
G. Yuan;K. Nishio;M. Lippmaa;A. Uedono
用正电子湮没技术研究了在钛酸锶衬底上外延生长DyScO_3或SrTiO_3薄膜时引入的氧空位的退火行为。在10−2Torr和10−6Torr氧压下，用脉冲激光分别沉积了10 nm和20 nm的DyScO_3和20 nm的SrTiO_3薄膜时，在衬底的界面附近引入了大量的氧空位。氧气氛下的后退火可以部分补偿SrTiO_3/SrTiO_3样品中的空位，而在SrTiO_3/DyScO_3或SrTiO_3/DyScO_3/SrTiO_3异质结中没有观察到空位补偿。这表明外延DyScO_3薄膜可以作为钝化层来抑制氧空位的扩散。
The annealing behaviour of oxygen vacancies introduced by epitaxial growth of DyScO3 or SrTiO3 films on SrTiO3 substrates was studied by positron annihilation. Many oxygen vacancies (VO) were introduced near the interface in SrTiO3 substrates when 10 nm DyScO3 or 20 nm SrTiO3 films were grown by pulsed laser deposition at 10−2 Torr or 10−6 Torr oxygen pressure, respectively. Post-annealing in oxygen ambient could partly compensate those vacancies in the SrTiO3/SrTiO3 samples while no vacancy compensation was observed in the SrTiO3/DyScO3 or SrTiO3/DyScO3/SrTiO3 heterostructures. This suggests that epitaxial DyScO3 films can be used as passivation layers to suppress the diffusion of oxygen vacancies.