Characterization of the effluent of a He/O2 microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry
Characterization of the effluent of a He/O2 microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry
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DOI：
10.1088/1367-2630/12/1/013021
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发表时间：
2010-01-22
影响因子：
3.3
通讯作者：
Schulz-von der Gathen, V.
中科院分区：
文献类型：
--
作者：
Ellerweg, D.;Benedikt, J.;Schulz-von der Gathen, V.
利用定量分子束质谱（MBMS）和双光子吸收激光诱导荧光光谱（TALIF）两种独立的诊断方法，分析了在氦气中含有少量分子氧（< 1.6%）的微尺度大气压等离子体射流（mu-APPJ）的流出物。用MBMS测量了大气中的原子氧密度、臭氧密度和分子氧的损耗，并用TALIF验证了原子氧密度。在高达4.7x10（15）cm（-3）的流出物中的绝对原子氧密度可以测量，两种诊断之间具有非常好的一致性。此外，在流出物中的臭氧浓度高达1.4 × 10（15）cm（-3）和O-2消耗高达10%，可以通过MBMS测量。原子氧密度在0.6%的O-2混合物处显示出最大值，而臭氧密度继续向更高的O-2混合物增加。随着距离的增加，从射流，原子氧密度降低，但仍然是可检测的距离为30毫米。臭氧密度随距离增加，在40毫米的距离饱和。通过应用更高的功率的mu-APPJ，原子氧密度线性增加，而臭氧密度呈现出最大值。
The effluent of a microscale atmospheric pressure plasma jet (mu-APPJ) operated in helium with a small admixture of molecular oxygen (< 1.6%) has been analyzed by means of two independent diagnostics, quantitative molecular beam mass spectrometry (MBMS) and two-photon absorption laser-induced fluorescence spectroscopy (TALIF). The atomic oxygen density, the ozone density and the depletion of molecular oxygen have been measured by MBMS and the atomic oxygen density has been validated by TALIF. Absolute atomic oxygen densities in the effluent up to 4.7x10(15) cm(-3) could be measured with a very good agreement between both diagnostics. In addition, ozone densities in the effluent up to 1.4x10(15) cm(-3) and an O-2 depletion up to 10% could be measured by MBMS. The atomic oxygen density shows a maximum value at an O-2 admixture of 0.6%, whereas the ozone density continues to increase toward higher O-2 admixtures. With increasing distance from the jet, the atomic oxygen density decreases but is still detectable at a distance of 30 mm. The ozone density increases with distance, saturating at a distance of 40 mm. By applying higher powers to the mu-APPJ, the atomic oxygen density increases linearly whereas the ozone density exhibits a maximum.