Polarization modulated transmission spectro‐ellipsometry
Polarization modulated transmission spectro‐ellipsometry
复制标题
偏振调制透射光谱椭偏仪
DOI：
10.1063/1.1146949
复制
发表时间：
1996
影响因子：
1.6
通讯作者：
Y. Fujita
中科院分区：
文献类型：
--
作者：
T. Fukazawa;Y. Fujita
偏振调制透射光谱椭偏仪（PMTSE）具有高延迟灵敏度和高速数据采集的特点。虽然光弹性调制器（PEM）的光学伺服控制提高了系统的精度，但主要是PEM的残余双折射阻碍了微小延迟的检测。我们已经安装了补偿器，以抵消残余双折射，并实现了基线偏移，是在0.2%的满量程。光学各向异性在穆勒矩阵中得到表达。大信号的准确性进行了验证，从测量的偏光片和石英旋转器。通过非晶聚烯烃薄膜和手性金属络合物Δ−[Co（en）3]3+水溶液的延迟光谱（<1 nm）确定可检测性，其峰值信号幅度<满量程的1%。在响应时间为3-4 ms的液晶5CB的动态响应测量中使用1 ms的时间分辨率。
A polarization modulated transmission spectro‐ellipsometer (PMTSE) features high sensitivity for retardation and high‐speed data acquisition. Although optical servo control of a photoelastic modulator (PEM) has improved the accuracy of the system, the residual birefringence mainly of the PEM hinders detection of minute retardation. We have installed a compensator in order to cancel out the residual birefringence and realized base line shift that is within 0.2% of full scale. Optical anisotropies are formulated in the Mueller matrices. Accuracy for a large signal was verified from measurements of a sheet polarizer and a quartz rotator. Detectability was ascertained from the retardation spectrum, <1 nm, of a amorphous poly‐olefin film and aqueous solution of a chiral metal complex, Δ−[Co(en)3]3+, whose peak signal magnitude is <1% of full scale. A time resolution of 1 ms was utilized in the dynamic response measurement of a liquid crystal, 5CB, that had a response time of 3–4 ms.