Nanopores within 3D-structured gold film for sensing applications
Nanopores within 3D-structured gold film for sensing applications
复制标题
用于传感应用的 3D 结构金膜内的纳米孔
DOI：
10.1049/cp.2016.0933
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
Carpignano F
中科院分区：
文献类型：
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作者：
Carpignano F
本文描述了在具有直径为1.2 μm、深为0.6 μm的六边形密排阵列的三维结构金薄膜中纳米孔的设计和制造。这些空腔是在自组装的聚合物球体阵列周围电镀金制成的。在移除球体和3D结构金薄膜后，用氦离子显微镜研磨一些微腔，通过微腔底部的中心直接穿过薄膜提供纳米孔。该装置内纳米孔的几何形状是用理论方法设计的，当用~ 600纳米的光（在水中）激发时，在纳米孔的正中心提供最佳的电场强度。在本文中，我们报告了用于评估金微腔中心/基底内纳米孔的最佳几何形状的理论模拟。虽然考虑了许多不同的几何形状和大小的孔隙，但理论结果提供了证据，证明具有圆角的50nm孔隙将在孔内提供最大的电场强度，并且制造结果为在这些3D金结构薄膜中创建这些纳米孔提供了演示的实用方法。
The design and fabrication of nanopores within three-dimensionally structured gold films with spherical microcavities of 1.2 μm diameter and 0.6 μm deep in hexagonal close-packed arrays, are described. The cavities are fabricated by electroplating gold around self-assembled arrays of polymer spheres. Following removal of the spheres, and `lift-off' of the 3D structured gold film, some of the microcavities were milled with a Helium Ion Microscope to provide nanopores through the centre of the microcavity base right through the film. The geometry of the nanopore within the device is designed using theoretical approaches to provide the optimal electric field intensity in the very centre of the nanopore when excited with light of ~ 600 nm (in water). In this paper we report the theoretical simulations used to evaluate the optimal geometry of the nanopore within the centre/base of the gold microcavity. Although a number of various geometries and sizes of pores were considered the theoretical results provide evidence that a pore of 50nm with rounded corners will provide the greatest electrical field intensity inside the pore and the fabrication results provide a demonstrated practical approach for creation of these nanopores within these 3D gold structured films.