Effects of Growth Temperature on Structural and Electrical Properties of Li－N－H Codoped ZnO
Effects of Growth Temperature on Structural and Electrical Properties of Li－N－H Codoped ZnO
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DOI：
10.1016/j.jmst.2012.12.009
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发表时间：
2013-03
影响因子：
10.9
通讯作者：
Y. F. Lu;Z. Ye;Luming Zhu;Yujia Zeng;J. Y. Huang;Binghui Zhao
中科院分区：
文献类型：
--
作者：
Y. F. Lu;Z. Ye;Luming Zhu;Yujia Zeng;J. Y. Huang;Binghui Zhao
Effects of growth temperature on the structural and electrical properties of Li–N–H codoped ZnO thin films grown by DC reactive magnetron sputtering were investigated. Scanning electron microscopy and X-ray diffraction results showed that increasing growth temperature could improve the crystalline quality. But Hall measurement results showed that growth temperature had a nonlinear influence on the electrical property. The variation of electrical properties with the growth temperature was found to be related to the activated concentration of N in ZnO and the evaporation of Li during the growth process, derived from the Hall measurement and the second ion mass spectroscopy measurement.
