Theory and application of a novel co-resonant cantilever sensor
Theory and application of a novel co-resonant cantilever sensor
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DOI：
10.1515/teme-2017-0139
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发表时间：
2018-06-01
影响因子：
1
通讯作者：
Muehl, Thomas
中科院分区：
文献类型：
--
作者：
Koerner, Julia;Reiche, Christopher F.;Muehl, Thomas
动态悬臂梁传感器在材料研究、生物、气体和磁场传感器等领域有着广泛的应用。传感原理是基于施加在悬臂梁上的力梯度或质量变化改变其振荡状态的效果，这可能与感兴趣的参数有关。为了检测非常小的相互作用，悬臂需要具有低刚度，这通常是通过减小梁的尺寸，特别是其厚度来实现的。本文提出了一种基于微纳米悬臂梁耦合和特征频率匹配的新型共振式悬臂梁传感器概念。这种方法允许获得纳米悬臂梁的高灵敏度的很大一部分，同时确保在微悬臂梁上使用标准的基于激光的方法进行可靠的振荡检测。悬臂式磁测量和磁力显微镜的实验证明了传感器概念的巨大潜力。此外，应用不仅限于材料的研究，相反，这一概念创造了一种悬臂式传感器平台，具有许多潜在的应用，例如作为气体、质量或压力传感器。
Dynamic cantilever sensors have many applications, for example in material's research, biology, as gas and magnetic field sensors. The sensing principle is based on the effect that a force gradient or mass change applied to the cantilever alter its oscillatory state which can be related to the parameter of interest. In order to detect very small interactions, the cantilever needs to have a low stiffness which is commonly achieved by a reduction of the beam's dimensions, especially its thickness. However, this is limited by the commonly employed laser-based detection of the cantilever's oscillatory state.In this paper, we describe a novel co-resonant cantilever sensor concept which is based on the coupling and eigenfrequency matching of a micro-and a nanocantilever. This approach allows to access a large fraction of the nanocantilever's high sensitivity while ensuring a reliable oscillation detection with standard laser-based methods at the microcantilever. Experiments in cantilever magnetometry and magnetic force microscopy demonstrate the immense potential of the sensor concept. Furthermore, applications are not limited to material's research, instead this concept creates a cantilever sensor platform with many potential applications, for example as gas, mass or pressure sensors.