Design and realization of a microracetrack resonator based polarization splitter in silicon-on-insulator
Design and realization of a microracetrack resonator based polarization splitter in silicon-on-insulator
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DOI：
10.1088/1464-4258/11/1/015506
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发表时间：
2008
影响因子：
--
通讯作者：
Qingzhong Huang;Yude Yu;Jinzhong Yu
中科院分区：
文献类型：
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作者：
Qingzhong Huang;Yude Yu;Jinzhong Yu
利用电子束光刻和电感耦合等离子体刻蚀技术，设计并实现了一种基于绝缘体上硅微腔谐振器的高效偏振分束器。偏振相关波导和微腔谐振器相结合，并利用分裂两个正交偏振。脊形波导被用来提高横电模式的耦合效率，并赋予谐振腔高性能的两个偏振。在实验中，分束比已实现约20 dB的下降端口约1550 nm的每个提取的偏振，在良好的协议与预测。
An efficient polarization splitter based on a microracetrack resonator in silicon-on-insulator has been designed and realized using electron beam lithography and inductively coupled plasma etching. Polarization-dependent waveguides and the microracetrack resonator are combined and exploited to split two orthogonal polarizations. Rib waveguides are employed to enhance the coupling efficiency for the transverse-electric mode and endow the resonator with high performance for both polarizations. In experiments, a splitting ratio has been achieved of about 20 dB at the drop port around 1550 nm for each extracted polarization, in good agreement with the prediction.