In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
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DOI：
10.1016/j.sna.2008.03.017
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发表时间：
2008-07-01
影响因子：
4.6
通讯作者：
Clews, P. J.
中科院分区：
文献类型：
--
作者：
Krishnamoorthy, U.;Olsson, R. H., III;Clews, P. J.
我们已经成功地展示了一系列的结果，推动了光学传感，加速度传感和光刻的极限。以前，我们制造了一些最灵敏的位移传感器，其位移灵敏度在1 kHz时低至12 fm/root Hz。使用参考检测电路结合相关双采样方法，我们将1/f噪声基底降低到10 mHz，从而将低频（10 mHz）下的检测限提高了77 dB，达到50 fm/root Hz。我们通过直接质量集成过程将这些高灵敏度位移传感器转换为高灵敏度加速度传感器。我们的加速度计具有低至36 Hz的谐振频率和低至8 nG/root Hz的热噪声基底（其中1G = 9.8 m/s（2））。我们已经推动了振动台实验的极限，以独立验证低至10 μ G/根Hz的加速度测量。直接测量与我们的集成亚波长光学纳米光栅加速度计显示设备的灵敏度为590 V/G和噪声基底对应于17 nG/根赫兹（在1赫兹）。(C)2008 Elsevier B. V.保留所有权利。
We have successfully demonstrated a series of results that push the limits of optical sensing, acceleration sensing and lithography. Previously, we built some of the most sensitive displacement sensors with displacement sensitivities as low as 12 fm/root Hz at 1 kHz. Using reference detection circuitry in conjunction with correlated double sampling methods, we lowered the 1/f noise floor to 10 mHz, hence improving the detection limit at low frequencies (10 mHz) by 77 dB to 50 fm/root Hz. We converted these highly sensitive displacement sensors to highly sensitive acceleration sensors through a direct mass integration processes. Our accelerometers have resonant frequencies as low as 36 Hz and thermal noise floors as low as 8 nG/root Hz (where 1G = 9.8 m/s(2)). We have pushed the limits of shaker table experiments to independently verify acceleration measurements as low as 10 mu G/root Hz. Direct measurements with our integrated sub-wavelength optical nano-grating accelerometers have shown device sensitivities of 590 V/G and noise floors corresponding to 17 nG/root Hz (at 1 Hz). (C) 2008 Elsevier B.V. All rights reserved.