FeCoSiN film with ordered FeCo nanoparticles embedded in a Si-rich matrix
FeCoSiN film with ordered FeCo nanoparticles embedded in a Si-rich matrix
复制标题
DOI：
10.1063/1.2714280
复制
发表时间：
2007-03
影响因子：
4
通讯作者：
Y. Liu;C. Tan;Zhongwu Liu;C. Ong
中科院分区：
文献类型：
--
作者：
Y. Liu;C. Tan;Zhongwu Liu;C. Ong
采用射频反应磁控溅射法在硅衬底上制备了由FeCo纳米颗粒有序阵列镶嵌在富硅基体中的FeCoSiN薄膜。这些纳米粒子具有面心立方结构，平均直径为1.7nm。FeCoSiN薄膜具有高达1000μΩcm的非常高的电阻率，这是由于金属连续体分裂成孤立的金属纳米颗粒。研究了薄膜的静态和动态磁性能。获得了1.0T的饱和磁化强度，在易磁化轴和难磁化轴上的磁化强度小于5Oe，以及27Oe的各向异性场。微波磁导率测量显示在低频下磁导率约为400，铁磁共振频率约为1.1GHz。
FeCoSiN film consisting of ordered arrays of FeCo nanoparticles embedded in a Si-rich matrix was fabricated on silicon substrate by reactive rf magnetron sputtering. These nanoparticles have a face-centered cubic structure and a mean diameter of ∼7nm. The FeCoSiN film has a very high resistivity of up to 1000μΩcm due to the breakup of the metal continuum into isolated metal nanoparticles. The static and dynamic magnetic properties of the film were also investigated. A saturation magnetization of 1.0T, coercivity of less than 5Oe in both easy and hard axes, and anisotropy field of 27Oe were obtained. The microwave permeability measurement showed a permeability of around 400 at low frequency and a ferromagnetic resonance frequency of about 1.1GHz.