CMOS Microelectrode Array for Electrochemical Lab-on-a-Chip Applications
CMOS Microelectrode Array for Electrochemical Lab-on-a-Chip Applications
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DOI：
10.1109/jsen.2009.2020193
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发表时间：
2009-05-01
影响因子：
4.3
通讯作者：
Sonkusale, Sameer
中科院分区：
文献类型：
--
作者：
Hwang, Sungkil;LaFratta, Christopher N.;Sonkusale, Sameer
微电极阵列（MEA）提供了许多优于宏电极的优点，这是由于其较小的样品尺寸要求、小的形状因子、低功耗以及由于质量传输速率增加而具有更高的灵敏度。这些特征使得MEA非常适合微流体芯片实验室应用。本文介绍了两种实现的MEA与芯片上的恒电位仪。我们首先描述了一个8 × 8阵列的6 μ m的圆形微电极与中心到中心的37 μ m的间距使用传统的微加工技术制造在硅上。提供垫用于电化学分析的恒电位仪的外部连接。第二个实现是一个可单独寻址的32 × 32阵列的7 μ m的正方形微电极与37 μ m的中心间距的CMOS芯片上内置的超大规模集成恒电位仪的电化学分析。集成的CMOS MEA在管芯级进行后处理，以在暴露的Al层上涂覆Au。为了验证微电极阵列的行为与个人的寻址能力，使用铁氰化钾（K3Fe（CN）（6））溶液进行循环伏安法。
Microelectrode arrays (MEAs) offer numerous benefits over macroelectrodes due to their smaller sample size requirement, small form factor, low-power consumption, and higher sensitivity due to increased rates of mass transport. These features make MEAs well suited for microfluidic lab-on-a-chip applications. This paper presents two implementations of MEAs with and without an on chip potentiostat. We first describe an 8 x 8 array of 6 mu m circular microelectrodes with center to center 37 mu m spacing fabricated on silicon using conventional microfabrication techniques. Pads are provided for external connections to a potentiostat for electrochemical analysis. The second implementation is an individually addressable 32 x 32 array of 7 mu m square microelectrodes with 37 mu m center to center spacing on a CMOS chip with built-in very-large-scale integration potentiostat for electrochemical analysis. The integrated CMOS MEA is post processed at the die level to coat the exposed Al layers with Au. To verify microelectrode array behavior with individual addressability, cyclic voltammetry was performed using a potassium ferricyanide (K3Fe(CN)(6))) solution.