Fabrication of 1D and 2D structures at submicrometer scale on lithium niobate by electron beam bombardment
Fabrication of 1D and 2D structures at submicrometer scale on lithium niobate by electron beam bombardment
复制标题
通过电子束轰击在铌酸锂上制造亚微米级一维和二维结构
DOI：
10.1016/s0925-3467(02)00244-6
复制
发表时间：
2003
影响因子：
3.9
通讯作者：
A. Barthélémy
中科院分区：
文献类型：
--
作者：
C. Restoin;S. Massy;C. Darraud;A. Barthélémy
利用一种创新的技术：电子束轰击与化学蚀刻相结合，在铌酸锂上实现了亚微米尺度的一维和二维结构。刻制的图案可以得到光子晶体，特别是光波长的光子带隙结构。首先介绍了该方法，然后研究了实验参数的影响，了解了它们对过程的影响。经过优化，得到了直径几百纳米的结构。
One and two dimensional structures at the submicrometer scale have been realized on lithium niobate using an innovative technique: the electron beam bombardment associated to chemical etching. The engraved patterns should allow one to get photonic crystal, and particularly photonic bandgap structures at optical wavelength. The method is presented in a first step and then, the influence of the experimental parameters is studied to understand their effects on the process. After optimization, structures of few hundreds nanometers in diameter have been obtained.
准相位匹配非线性光学器件
DOI：
--
发表时间：
2007
期刊：
影响因子：
--
作者：
D. Matsumoto;Y. Urakami;T. Arai and Y. Watanabe;S. W. Cheong;新居陽一;足立 宗之;石原祐子;S. Kaku and Y. Watanabe;新高誠司;S.Kurimura
通讯作者：
S.Kurimura