Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films
Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films
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DOI：
10.1557/jmr.1988.0931
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发表时间：
1988-09
影响因子：
2.7
通讯作者：
T. Weihs;Soon Hyung Hong;J. Bravman;W. Nix
中科院分区：
文献类型：
--
作者：
T. Weihs;Soon Hyung Hong;J. Bravman;W. Nix
悬臂微梁的力学挠度是一种测试薄膜力学性能的新技术。利用传统的硅微加工技术制备了Au和SiO_2的单层微梁。梁的典型厚度尺寸为1.0 μm，宽度尺寸为20 μm，长度尺寸为30 μm。光束通过纳米压痕机进行机械偏转，这是一种亚微米压痕仪器，可以连续监测负载和偏转。利用简单梁理论和载荷-挠度数据，确定了构成梁的薄膜材料的杨氏模量和屈服强度。将测量的机械性能与由衬底支撑的类似薄膜压痕获得的力学性能进行比较。
The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO_2 have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 μm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young’s moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.