Characterization of Low Noise TES Detectors Fabricated by D-RIE Process for SAFARI Short-Wavelength Band
Characterization of Low Noise TES Detectors Fabricated by D-RIE Process for SAFARI Short-Wavelength Band
复制标题
采用 D-RIE 工艺制造的 SAFARI 短波长波段低噪声 TES 探测器的表征
DOI：
10.1007/s10909-014-1131-7
复制
发表时间：
2014
影响因子：
2
通讯作者：
H. Hoevers
中科院分区：
文献类型：
--
作者：
P. Khosropanah;T. Suzuki;R. Hijmering;M. Ridder;M. Lindeman;J.;H. Hoevers
SRON正在为SPICA使命上SAFARI仪器的短波段研制基于悬浮SiN膜上的超导Ti/Au双层的TES探测器。我们最近用深反应离子刻蚀取代了硅衬底的湿法KOH刻蚀。新工艺使我们能够在基底上制造探测器，并在最后一步释放膜。因此，在薄SiN膜（250 nm）上生产SAFARI大阵列（43$$\，{\times }\，$$×43）是可行的。它还可以实现$$\le $$≤1 $$\upmu $$μm的窄支撑SiN腿，这是满足SAFARI NEP要求所需的。在这里，我们报告的电流-电压特性，噪声性能和阻抗测量这些设备。然后将测量结果与分布式腿模型进行比较，该模型考虑了由于SiN腿引起的热波动噪声。我们测得的暗NEP为0.7 aW/Hz，比理论预期的声子噪声高1.6倍。
SRON is developing TES detectors based on a superconducting Ti/Au bilayer on a suspended SiN membrane for the short-wavelength band of the SAFARI instrument on SPICA mission. We have recently replaced the wet KOH etching of the Si substrate by deep reactive ion etching. The new process enables us to fabricate the detectors on the substrate and release the membrane at the very last step. Therefore the production of SAFARI large arrays (43$$\,{\times }\,$$×43) on thin SiN membrane (250 nm) is feasible. It also makes it possible to realize narrow supporting SiN legs of $$\le $$≤1 $$\upmu $$μm, which are needed to meet SAFARI NEP requirements. Here we report the current–voltage characteristics, noise performance and impedance measurement of these devices. The measured results are then compared with the distributed leg model that takes into account the thermal fluctuation noise due to the SiN legs. We measured a dark NEP of $$\sim $$∼0.7 aW/$$\sqrt{\hbox {Hz}}$$Hz, which is 1.6 times higher than the theoretically expected phonon noise.
SPICA-SAFARI 探测器系统：具有频分复用 SQUID 读数的 TES 探测器阵列
影响因子：
3.2
作者：
Jackson B
通讯作者：
Jackson B