Optical constants of materials for multilayer mirror applications in the EUV/soft x-ray region
Optical constants of materials for multilayer mirror applications in the EUV/soft x-ray region
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EUV/软 X 射线区域多层反射镜应用材料的光学常数
DOI：
10.1117/12.278851
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发表时间：
1997
影响因子：
1.9
通讯作者：
E. Gullikson
中科院分区：
文献类型：
--
作者：
R. Soufli;E. Gullikson
求和规则测试表明，在多层反射镜应用中重要的材料（例如Si和Mo）的可用光学数据中存在缺陷，导致折射率n的真实的和虚部的估计误差等于1 -（delta）+ i（beta）（（delta）、（beta）也称为“光学常数”）。利用角度相关反射测量研究了Si在50 - 180 eV区域的折射率。结果表明，反射率法在一定的能量范围内效率有限。在60 - 930 eV的能量范围内进行Mo的折射率的透射测量。使用新的实验结果，以形成一个改进的，自洽的数据库的真实的和虚部的n为Si和Mo和它们相比，在1993年的原子表中的值。利用这些结果计算了Mo/Si和Mo/Be多层膜反射镜的正入射反射率。
Sum rule tests demonstrate that there are deficiencies in the available optical data for materials important in multi-layer mirror applications, such as Si and Mo, leading to errors in the estimation of the real and imaginary parts of the refractive index n equals 1 - (delta) + i(beta) ((delta) , (beta) are also known as 'optical constants'). The refractive index of Si is investigated in the region 50 - 180 eV using angle dependent reflectance measurements. It is shown that the reflectance method has limited efficiency in certain energy regions. Transmission measurements for the refractive index of Mo are performed in the energy range 60 - 930 eV. The new experimental results are used in order to form an improved, self-consistent database for the real and the imaginary part of n for Si and Mo and they are compared to the values in the 1993 atomic tables. The normal incidence reflectivities of Mo/Si and Mo/Be multilayer mirrors are calculated using the new results.