Multifunctional FeCo/TiN Multilayer Thin Films with Combined Magnetic and Protective Properties
Multifunctional FeCo/TiN Multilayer Thin Films with Combined Magnetic and Protective Properties
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DOI：
10.1002/adem.200900214
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发表时间：
2009-12
影响因子：
3.6
通讯作者：
C. Klever;M. Stüber;H. Leiste;E. Nold;K. Seemann;S. Ulrich;H. Brunken;A. Ludwig;C. Thede;E. Quandt
中科院分区：
文献类型：
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作者：
C. Klever;M. Stüber;H. Leiste;E. Nold;K. Seemann;S. Ulrich;H. Brunken;A. Ludwig;C. Thede;E. Quandt
自20世纪80年代初以来，在工程技术中已经建立了通过物理气相沉积（PVD）工艺产生的厚度范围从几纳米到几微米的涂层。特别地，磁控溅射耐磨涂层在工业上已经建立并且能够显著地提高工具寿命。然而，在不可能对使用中的涂层进行光学检查的情况下，膜的固有传感器功能将是有益的。因此，建议开发基于磁致弹性铁磁相插入的具有集成传感器功能的耐磨涂层。结合适当的读出电子设备，这样的薄膜系统将准备好在线监测涂层的实际状态（例如，应变、温度、体积损失）。本文的重点是开发耐磨涂层，同时提供有益的机械性能以及针对在线非接触式读出应用优化的铁磁性能。通过磁控溅射TiN和FeCo层的交替堆叠获得的多层涂层的标称总厚度为1000 nm，作为满足上述条件的模型系统。双层周期变化到2.6 nm，而单层厚度比tTiN/tFeCo由沉积速率确定，并保持恒定在约3/1的值。在沉积之后，在静磁场中对膜进行非原位真空退火。描述了沉积态和退火态涂层的组成及其机械性能（纳米硬度、杨氏模量）和磁性能（磁化滞后、频率依赖磁导率）。最后，简要讨论了涂层在远程可查询磨损传感器应用中的适用性。
Coatings with thicknesses ranging from a few nanometer up to several micrometer produced by physical vapor deposition (PVD) processes have been established in engineering technologies since the early 1980s. In particular, magnetron sputtered wear resistance coatings are industrially established and capable to enhance tool lifetimes significantly. However, in cases where optical inspection of a coating in use is not possible, an intrinsic sensor function of the film would be beneficial. Therefore, the development of wear resistant coatings with an integrated sensor functionality based on the insertion of a magnetoelastic ferromagnetic phase is suggested. In combination with appropriate read‐out electronics such a film system would be ready for online monitoring of the coatings' actual state (e.g., strain, temperature, volume loss). This paper focuses on the development of wear resistance coatings which simultaneously supply beneficial mechanical properties as well as ferromagnetic properties optimized for online non‐contact read‐out applications. Multilayer coatings obtained through alternate stacking of magnetron sputtered TiN and FeCo layers with a nominal total thickness of 1000 nm were produced as a model system meeting the above conditions. The bilayer period was varied down to 2.6 nm while the individual layer thickness ratio tTiN/tFeCo was determined by the deposition rates and maintained constant at a value of about 3/1. The films were vacuum annealed ex situ in a static magnetic field subsequent to the deposition. The constitution of the as‐deposited and annealed coatings as well as their mechanical (nanohardness, Young's modulus) and magnetic properties (magnetization hysteresis, frequency‐dependent permeability) are described. Finally, the suitability of the coatings for the use in remote‐interrogable wear sensor applications is briefly discussed.