Indium Tin Oxide Broadband Metasurface Absorber
Indium Tin Oxide Broadband Metasurface Absorber
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DOI：
10.1021/acsphotonics.8b00781
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发表时间：
2018-09-01
期刊：
影响因子：
7
通讯作者：
Yu, Nanfang
中科院分区：
文献类型：
--
作者：
Shrestha, Sajan;Wang, Yu;Yu, Nanfang
超材料被设计用来实现广泛的功能。超材料吸收剂在红外探测器、发射率涂层和光伏电池等各种应用中都有特别的应用。各种超材料平台已经被证明可以实现完美的吸收，并且已经进行了几次尝试来延长这些设备的吸收带宽。我们展示了一种宽带红外吸收器，使用由单片制造的两层超表面组成的不对称法布里-珀罗腔。通过调整超表面层的结构和腔体的厚度来实现超倍程的光学吸收。该器件在λ = 4-16 μ m范围内的吸收率超过80%，同时在大入射角范围内保持性能。与大多数超材料吸收器相比，我们的超表面层是由定制的氧化铟锡（ITO）制成的，与以前使用贵金属的方法相比，具有CMOS兼容性的优势。
Metamaterials have been designed to achieve a wide range of functionalities. Metamaterial absorbers are of particular interest for various applications such as infrared detectors, emissivity coatings, and photovoltaic cells. Various metamaterial platforms have been demonstrated to achieve perfect absorption and several attempts have been made to extend the absorption bandwidth of such devices. We demonstrate a broadband infrared absorber using an asymmetric Fabry-Perot cavity consisting of a monolithically fabricated two-layer metasurface. Superoctave optical absorption is achieved by tailoring the structure of the metasurface layers and the thickness of the cavity. The device yields absorptance of over 80% from lambda = 4-16 mu m, while maintaining the performance over a wide range of incident angles. In contrast to most metamaterial absorbers, our metasurface layers are made of customized indium tin oxide (ITO), conferring the advantage of CMOS compatibility compared to previous approaches using noble metals.