M. Suemitsu, Y. Tsukidate, and H. Nakazawa: "Effects of Surface Phosphorus on the Kinetics of Hydrogen Desorption from Silane-adsorbed Si(100) Surface at Room Temperatures"J. Vac. Sci. Technol.. A16. 1772-1774 (1998)

M. Suemitsu, Y. Tsukidate, and H. Nakazawa: "Effects of Surface Phosphorus on the Kinetics of Hydrogen Desorption from Silane-adsorbed Si(100) Surface at Room Temperatures"J. Vac. Sci. Technol.. A16. 1772-1774 (1998)
复制标题

M. Suemitsu、Y. Tsukidate 和 H. Nakazawa:“表面磷对室温下硅烷吸附的 Si(100) 表面氢解吸动力学的影响”J。

DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
--
中科院分区:
--
文献类型:
--
作者:

文献摘要

相似文献