Fabrication of flexible reduced graphene oxide/Fe2O3 hollow nanospheres based on-chip micro-supercapacitors for integrated photodetecting applications
Fabrication of flexible reduced graphene oxide/Fe2O3 hollow nanospheres based on-chip micro-supercapacitors for integrated photodetecting applications
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DOI：
10.1007/s12274-015-0923-7
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发表时间：
2016-02-01
期刊：
影响因子：
9.9
通讯作者：
Shen, Guozhen
中科院分区：
文献类型：
--
作者：
Gu, Shaosong;Lou, Zheng;Shen, Guozhen
微型超级电容器（MSC）作为重要的片上微功率源已经引起了相当大的关注，因为其独特且有利的设计用于在最小尺寸的芯片内优化最大功能并且在小型化便携式电子设备应用中具有优异的机械灵活性/稳定性。在这项工作中，我们报告了一种新的，高性能的灵活集成片上MSC的基础上的混合纳米结构的还原氧化石墨烯/Fe 2 O3空心纳米球使用微电子光刻技术结合等离子体刻蚀技术。片上MSC的独特结构设计使得与仅石墨烯的器件相比能够实现高性能增强，在200 mV.s（-1）的扫描速率下表现出11.57F.cm（-3）的高比电容，以及优异的速率能力和稳健的循环稳定性，在32，000次充电/放电循环后电容保持率为92.08%。此外，即使在不同弯曲状态下重复充电/放电循环之后，片上MSC也表现出上级柔性和突出的稳定性。所制造的高度灵活的片上MSC可以很容易地与基于CdS纳米晶的光电探测器集成，以形成高度紧凑的光电探测系统，表现出与由传统的外部能量存储单元驱动的器件相当的性能。
Micro-supercapacitors (MSCs) as important on-chip micropower sources have attracted considerable attention because of their unique and advantageous design for optimized maximum functionality within a minimized sized chip and excellent mechanical flexibility/stability in miniaturized portable electronic device applications. In this work, we report a novel, high-performance flexible integrated on-chip MSC based on hybrid nanostructures of reduced graphene oxide/Fe2O3 hollow nanospheres using a microelectronic photo-lithography technology combined with plasma etching technique. The unique structural design for on-chip MSCs enables high-performance enhancements compared with graphene-only devices, exhibiting high specific capacitances of 11.57 F.cm(-3) at a scan rate of 200 mV.s(-1) and excellent rate capability and robust cycling stability with capacitance retention of 92.08% after 32,000 charge/discharge cycles. Moreover, the on-chip MSCs exhibit superior flexibility and outstanding stability even after repetition of charge/discharge cycles under different bending states. As-fabricated highly flexible on-chip MSCs can be easily integrated with CdS nanowire-based photodetectors to form a highly compacted photodetecting system, exhibiting comparable performance to devices driven by conventional external energy storage units.