Design and evaluation of dual inlet ICP torch for low gas consumptionPresented at the 2002 Winter Conference on Plasma Spectrochemistry, Scottsdale, AZ, USA, January 6???12, 2002.
Design and evaluation of dual inlet ICP torch for low gas consumptionPresented at the 2002 Winter Conference on Plasma Spectrochemistry, Scottsdale, AZ, USA, January 6???12, 2002.
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低气体消耗双入口 ICP 炬管的设计和评估发表于 2002 年冬季等离子体光谱化学会议，美国亚利桑那州斯科茨代尔，2002 年 1 月 6 日至 12 日。
DOI：
10.1039/b202178a
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发表时间：
2002
影响因子：
3.4
通讯作者：
A. Okino
中科院分区：
文献类型：
--
作者：
H. Yabuta;H. Miyahara;Masato Watanabe;E. Hotta;A. Okino
在这项研究中，我们专注于提高涡流均匀性，这被认为是我们新型 ICP 炬管设计的关键因素。为了以较低的等离子气体消耗获得均匀的涡流，我们的新型 ICP 炬管具有双气体入口，并且可转换为氦气和氩气 ICP。通过这一改进，氦 ICP 能够以比我们之前的炬管低 10-20% 的等离子气体流速运行。为了确认双入口的效果，使用高速视频系统对流量进行了比较，并测量了氦气和氩气的发射线谱的噪声功率谱。这些测量的结果是，双入口 ICP 的等离子体旋转频率高于单入口炬的等离子体旋转频率。结果表明，双入口对等离子气流的阻尼较小，并且可以以较低的等离子气体消耗产生足够的涡流。
In this study, we concentrated on improving the vortex flow uniformity, which was considered as a key factor for our new ICP torch design. To obtain a uniform vortex flow with lower plasma gas consumption, our new ICP torch had a dual gas inlet, and convertibility for helium and argon ICP. With this modification, helium ICP was able to operate with a 10–20% lower plasma gas flow rate than our previous torch. To confirm the effects of the dual inlet, the flows were compared using a high-speed video system, and the noise-power spectra of the emission line spectrum of helium and argon were measured. As the result of these measurements, the ICP with the dual inlet had higher frequency of plasma rotation than that of the single inlet torch. It is shown that the dual inlet gives less damping of the plasma gas flow and that adequate vortex flow can be generated with lower plasma gas consumption.