Generation of large indium clusters by sputtering
Generation of large indium clusters by sputtering
复制标题
通过溅射生成大型铟簇
DOI：
10.1103/physrevb.66.075419
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发表时间：
2002
影响因子：
3.7
通讯作者：
A. Wucher
中科院分区：
文献类型：
--
作者：
C. Staudt;A. Wucher
我们研究了在15 kev ${\ mathm {Xe}}^{+}$离子轰击下，从纯铟表面溅射出中性和带电${\ mathm {In}}_{n}$团簇的产率。结果表明，可以检测到含有多达200个原子的大型中性团簇。如果根据大小相关的检测效率对测量信号进行校正，则发现根据${n}^{\ensuremath{-}\ensuremath{\delta}}$的逆幂定律产率分布，对于小$(nl~20)$和大$(20l~nl~100)$的衰减指数分别为-3.9和-2.1。这一发现缩小了已发表的质谱和电子显微镜关于溅射星团大小分布的数据之间的差距。这也表明溅射中大簇的产生是由流体力学甚至热力学机制控制的，而不是由导致小簇发射的快速碰撞过程控制的。
We have investigated the yields of neutral and charged ${\mathrm{In}}_{n}$ clusters sputtered from a pure indium surface under bombardment with 15-keV ${\mathrm{Xe}}^{+}$ ions. It is shown that large neutral clusters containing up to 200 atoms can be detected. If the measured signals are corrected for size-dependent detection efficiency, an inverse power-law yield distribution according to ${n}^{\ensuremath{-}\ensuremath{\delta}}$ is found which exhibits two decay exponents of -3.9 for small $(nl~20)$ and -2.1 for large $(20l~nl~100)$ clusters. This finding closes the gap between published mass spectrometric and electron microscopy data on the size distributions of sputtered clusters. It also indicates that the generation of large clusters in sputtering is governed by hydrodynamical or even thermodynamical mechanisms rather than the fast collisional processes leading to the emission of small clusters.