Continuous wave infrared laser deposition of organic thin films

Continuous wave infrared laser deposition of organic thin films
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有机薄膜的连续波红外激光沉积

DOI：
10.1088/1742-6596/59/1/112
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发表时间：
2007
期刊：
--
影响因子：
--
通讯作者：
H. Koinuma
H. Koinuma
中科院分区：
--
文献类型：
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作者：
Seiichiro Yaginuma;Junpei Yamaguchi;M. Haemori;K. Itaka;Y. Matsumoto;M. Kondo;H. Koinuma

文献摘要

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我们发展了一种连续波红外激光分子束外延（CW-IR-LMBE）优化的有机半导体薄膜的制造。用CW-IR-LMBE沉积的这些有机薄膜的晶体质量与用热蒸发沉积的那些基本上相同。由于可以快速切换蒸发源，CW-IR-LMBE特别有利于快速筛选材料中的成分、厚度和制造参数，以及基于组合技术的器件优化。
We developed a continuous-wave infrared laser molecular beam epitaxy (CW-IR-LMBE) optimized for the fabrication of organic semiconductor films. The crystal quality of these organic thin films deposited by CW-IR-LMBE was substantially the same as those deposited by thermal evaporation. Due to the possibility of quick switching of evaporation sources, CW-IR-LMBE is especially advantageous for rapid screening of composition, thickness, and fabrication parameters in materials and device optimization based on combinatorial technology.