Economic MEMS based 3-axis water proof accelerometer for dynamic geo-engineering applications
Economic MEMS based 3-axis water proof accelerometer for dynamic geo-engineering applications
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DOI：
10.1016/j.soildyn.2011.12.001
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发表时间：
2012-05-01
影响因子：
4
通讯作者：
Alexander, Nick
中科院分区：
文献类型：
--
作者：
Bhattacharya, Subhamoy;Krishna, A. Murali;Alexander, Nick
加速度计是现场或实验室规模实验中监测动态敏感系统最常用的传感器之一。动态地球工程应用的关键要求之一是这些传感器应该防水或水不敏感。实践中使用的传统加速度计是基于压电/压阻技术的，通常是水敏的。它们也是单轴的（可以测量一维加速度），体积大，价格昂贵（典型的最低价格是300美元/轴）。这些加速度计适用于处理饱和土壤的动态地球工程应用，通过用适当的密封剂密封电缆和加速度计的连接处。本文介绍了一种价格低廉（约10美元/轴）、重量轻、三轴（可测量三维加速度）的基于微机电系统（MEMS）的加速度计的发展及其在地球工程问题中的应用。该传感器基于ADXL 335芯片，可以防水。介绍了三轴MEMS加速度计的性能及其防水方法。(C) 2011 Elsevier Ltd.版权所有。
Accelerometers are one of the most used sensors for monitoring dynamically sensitive systems either in field or in laboratory scale experiments. One of the key requirements in dynamic geo-engineering application is that these sensors should be water proof or water insensitive. Traditional accelerometers used in practice are based on piezoelectric/piezoresistive technology and are generally water sensitive. They are also one-axis (can measure one dimensional acceleration), big in size and expensive (typical minimum price is 300 USD/axis). These accelerometers are adapted in dynamic geo-engineering applications dealing with saturated soils by sealing the junction of the cables and the accelerometer by appropriate sealants. In this paper, the development of an inexpensive (circa 10 USD/axis), light weight, three-axis (can measure three dimensional accelerations) Micro Electro Mechanical Systems (MEMS) based accelerometers and their application to geo-engineering problems is presented. The sensor is based on ADXL 335 chip and can be made water proof. Performance of 3-axis MEMS accelerometer is presented along with the methodology to make it water proof. (C) 2011 Elsevier Ltd. All rights reserved.