Study on the tribological properties of hard films deposited on biomedical NiTi alloy
Study on the tribological properties of hard films deposited on biomedical NiTi alloy
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DOI：
10.1016/j.matchemphys.2011.03.051
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发表时间：
2011-09
影响因子：
4.6
通讯作者：
Jigang Wang;Min Liu
中科院分区：
文献类型：
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作者：
Jigang Wang;Min Liu
采用反应直流磁控溅射法在医用NiTi合金基体上分别沉积了氮化碳（CNx）、类金刚石（DLC）和氮化钛（TiN）硬质薄膜。为了增强硬质薄膜与NiTi合金基体之间的结合力，在薄膜表面预沉积了一层Ti过渡层。利用划痕仪和摩擦磨损试验机系统地研究了沉积硬质膜的摩擦学性能。结果表明，沉积梯度薄膜后，NiTi合金基体的摩擦学性能得到了有效的改善。Ti过渡层的沉积有利于提高NiTi基体合金与无机硬质薄膜的结合强度，尤其是对CNx薄膜的结合强度。在三种梯度薄膜中，Ti/CNx薄膜的摩擦学性能最好（摩擦系数最小为0.092，摩擦磨损试验后表面仍保持光滑完整）。
Hard films including carbon nitride (CNx), diamond-like carbon (DLC), and titanium nitride (TiN) were respectively deposited on the biomedical NiTi alloy substrate by using reactive direct current magnetron sputtering. A Ti transition layer was pre-deposited in order to strengthen the adhesion between the hard films and NiTi alloy substrate. The tribological properties of the deposited hard films were systematically investigated by using scratch tester and friction wear tester. It was shown that the tribological performance of NiTi alloy substrate was improved effectively after the deposition of gradient films. The deposition of Ti transition layer benefited in increasing the adhesion strength between the NiTi substrate alloy and the inorganic hard films, especially for the CNx film. Among the three types of gradient films, Ti/CNx film possessed the best tribological performance (with the minimum friction coefficient of 0.092 and the maintenance of smooth and intact surface after the friction and wear tests).