SOIPIX R&D programme and applications

SOIPIX R&D programme and applications
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SOIPIX R

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发表时间:
2015
期刊:
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通讯作者:
L. Soung
L. Soung
中科院分区:
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文献类型:
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作者:
E. Gil;L. Soung

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SOIPiX是一个研发项目,旨在开发采用绝缘体上硅技术的单片式像素探测器,用于未来的高能物理实验、X射线实验和其他应用。它将辐射传感器和LSI电路集成在一个芯片中,以实现高分辨率和智能探测器。在简要介绍了单片式有源像素传感器的优点之后,讨论了SOI单片式传感器的主要特性:工艺过程、对入射辐射的响应和抗辐射性能。将特别注意对所谓的“后门”效应的描述以及为减轻这种效应而开发的不同技术。最后介绍了该技术的各种应用。
SOIPiX is a R&D project targeting the development of monolithic pixel detectors with Silicon On Insulator technology for future high energy physics experiments, X-ray experiments, and other applications. It integrates both radiation sensors and LSI circuits in one chip to achieve high resolution and intelligent detectors. After a short introduction about the advantages of monolithic active pixel sensors, the main characteristics of SOI monolithic sensors will be discussed: technological process, response to incident radiation and radiation hardness. Special attention will be given to the description of the so-called “back-gate” effect and the different techniques developed to mitigate it. Finally, various applications of this technology will be presented.