Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units
Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units
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多个内部天线单元维持的感应耦合氩等离子体中离子能量分布的表征
DOI：
10.1143/jjap.47.6900
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发表时间：
2008
影响因子：
1.5
通讯作者：
A. Ebe
中科院分区：
文献类型：
--
作者：
K. Takenaka;Y. Setsuhara;Kazuaki Nishisaka;A. Ebe
我们的特点是在氩等离子体中的离子能量分布维持多个内部天线单元作为Ar压力的函数。使用带有质量分离器的离子能量分析仪测量了分布。离子能量分布的峰值对压强的依赖性更强，并与等离子体电势的大小相对应。的分布的半高全宽随着降低天线射频电压造成的Ar压力的降低。
We have characterized the ion energy distribution in argon plasmas sustained by multiple internal antenna units as a function of Ar pressure. The distribution has been measured using an ion energy analyzer with a mass separator. The peak of ion energy distribution depended more strongly on pressure and corresponded to the magnitude of plasma potential. The full width at half maximum of the distributions decreased with decreasing antenna RF voltage caused by a decrease in Ar pressure.