Neutron Detector Design Based on ALD Coated MCP
Neutron Detector Design Based on ALD Coated MCP
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DOI：
10.1016/j.phpro.2012.03.010
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
N. Lu;Yigang Yang;J. Lv;J. Pan;Manchun Liang;Xuewu Wang;Yuanjing Li
中科院分区：
文献类型：
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作者：
N. Lu;Yigang Yang;J. Lv;J. Pan;Manchun Liang;Xuewu Wang;Yuanjing Li
本文研究了两种微通道板（MCP）：natGd_2O_3涂层MCP和natGd掺杂MCP的热中子探测效率。Monte Carlo模拟结果表明，两种MCP对25.3meV中子的探测效率分别为70%和60%。空间分辨率优于100μm。采用原子层沉积（ALD）技术实现了natGd2O3薄膜的镀膜工艺，在微通道板孔内表面成功地制备了100 nm natGd2O3薄膜。
In this paper, we research the efficiency of thermal neutron detection for two kinds of micro channel plates (MCP): natGd2O3 coated MCP and natGd doped MCP. Monte Carlo simulation results show that both MCPs can achieve high detection efficiency for 25.3meV neutron of about 70% and 60% respectively. The spatial resolution of them is better than 100μm. Atomic layer deposition (ALD) technique is used to implement the natGd2O3 film coating process, and ∼100nm natGd2O3 film on the inner surface of MCP pores has been realized.