Compact x-ray microscope for the water window based on a high brightness laser plasma source
Compact x-ray microscope for the water window based on a high brightness laser plasma source
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DOI：
10.1364/oe.20.018362
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发表时间：
2012-07-30
期刊：
影响因子：
3.8
通讯作者：
Diete, W.
中科院分区：
文献类型：
--
作者：
Legall, H.;Blobel, G.;Diete, W.
我们推出了一种基于激光等离子体的 X 射线显微镜，用于水窗，采用高平均功率激光系统来产生等离子体。在 90 W 激光功率下，测量 2.478 nm 处氮 Ly α 线发射的亮度为 7.4 x 10(11) 光子/(s x sr x mu m(2))。使用反射率为 0.3% 的多层聚光镜，在物平面中获得 10(6) 个光子/(μ m(2) x s)。在 60 W 激光功率下进行的显微镜检查可分辨 40 nm 线，曝光时间为 60 s。通过使用新型多层聚光镜光学器件并以 130 W 的全功率运行激光器，曝光时间可进一步缩短至 20 秒。 (C) 2012 年美国光学学会
We present a laser plasma based x-ray microscope for the water window employing a high-average power laser system for plasma generation. At 90 W laser power a brightness of 7.4 x 10(11) photons/(s x sr x mu m(2)) was measured for the nitrogen Ly alpha line emission at 2.478 nm. Using a multilayer condenser mirror with 0.3 % reflectivity 10(6) photons/(mu m(2) x s) were obtained in the object plane. Microscopy performed at a laser power of 60 W resolves 40 nm lines with an exposure time of 60 s. The exposure time can be further reduced to 20 s by the use of new multilayer condenser optics and operating the laser at its full power of 130 W. (C) 2012 Optical Society of America