A study of the micro-machining process on quartz crystals using an abrasive slurry jet
A study of the micro-machining process on quartz crystals using an abrasive slurry jet
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DOI：
10.1177/0954405414528167
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发表时间：
2015-03
期刊：
影响因子：
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通讯作者：
H. Qi;J. Fan;Jun Wang
中科院分区：
文献类型：
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作者：
H. Qi;J. Fan;Jun Wang
本文研究了磨料浆液射流在石英晶体上的微通道过程。首先对材料去除过程、表面质量以及材料去除速率、槽深、槽顶宽度和槽壁倾角等工艺参数对槽道性能的影响进行了实验研究。结果表明，采用较小的射流冲击角的较小颗粒可以在石英晶体表面形成良好的微通道顶缘外观和底部表面光洁度，但以牺牲材料的去除速度为代价。将量纲分析方法与颗粒冲击冲蚀理论相结合，建立了考虑挤压油膜对冲击冲蚀影响的材料去除速率和微通道深度预测模型。对模型进行了实验验证，发现模型预测值与相应的实验值吻合较好。
An investigation of the micro-channelling process on a quartz crystal using an abrasive slurry jet is presented. An experimental study is conducted first to understand the material removal process, surface quality as well as the effect of process parameters on the channelling performance, namely the material removal rate, channel depth, top channel width and channel wall inclination angle. It is found that a good micro-channel top edge appearance and bottom surface finish can be produced on quartz crystal by employing smaller particles with a relatively small jet impact angle, but at the sacrifice of material removal rate. Predictive models for material removal rate and micro-channel depth are then developed using a combination of the dimensional analysis method and the particle impact erosion theories, where the squeeze film effect on the impact erosion is considered. The models are verified experimentally and it is found that the model predictions are in good agreement with the corresponding experimental data.