Precision Polishing of Micro Mold by Using Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism
Precision Polishing of Micro Mold by Using Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism
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DOI：
10.4028/www.scientific.net/amr.325.470
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发表时间：
2011-08
期刊：
影响因子：
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通讯作者：
Sze Keat Chee;H. Suzuki;Mutsumi Okada;Takeshi Yano;T. Higuchi;Weimin Lin
中科院分区：
文献类型：
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作者：
Sze Keat Chee;H. Suzuki;Mutsumi Okada;Takeshi Yano;T. Higuchi;Weimin Lin
数字设备如DVD采集系统、μ-TAS、太阳光学等医疗设备对复杂微结构精密模具的需求日益增加[1 - 5]。结构模具在磨削或切削后必须进行抛光，以提高表面粗糙度。提出并研制了一种基于压电陶瓷的二维低频振动（2DLFV）抛光驱动器。2DLFV由4个机械振幅放大驱动器（MechaTrans）、一个与机械变压器相结合的多层堆叠压电驱动器（PZT）和一个中心片组成。机械变压器是一种柔性铰链结构，可以将多层堆叠压电驱动器的行程放大7倍左右，达到120 μm。在此驱动下，工具沿圆周轨迹振动以达到抛光效果。在抛光实验中，用金刚石浆对碳化钨模具（工件）进行抛光。对工件的表面粗糙度和抛光效率进行了评价。实验结果表明，低频振动特别是2DLFV是一种有效的微结构模具抛光系统。
Demands of precision molds with complicated microstructures for digital devices such as DVD pick-up system, medical devices such as μ-TAS and solar optics etc. are increasing [1 - 5]. The structured molds must be polished after grinding or cutting in order to improve the surface roughness. In this paper, a two dimensional low frequency vibration (2DLFV) polishing actuator using PZT is proposed and developed. The 2DLFV consists of 4 mechanical amplitude magnified actuators (MechaTrans), a multilayer stacked piezoelectric actuator (PZT) incorporated with mechanical transformer, and a center piece. Mechanical transformer is a kind of flexure hinges structured that magnifies the stroke of the multilayer stacked piezoelectric actuator around 7 times to 120 μm. With this actuation, the tool vibrates in a circle trajectory to achieve polishing effect. In the polishing experiments, tungsten carbide molds (workpieces) are polished with diamond slurry. The surface roughness of the work pieces and polishing efficiency are evaluated. From the experimental results, it was found that low frequency vibration especially 2DLFV is a useful polishing system for micro structured mold.