Design of ion energy distributions by a broad beam ion source
Design of ion energy distributions by a broad beam ion source
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宽束离子源的离子能量分布设计
DOI：
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发表时间：
1996
期刊：
影响因子：
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通讯作者：
F. Bigl
中科院分区：
文献类型：
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作者：
M. Zeuner;J. Meichsner;H. Neumann;F. Scholze;F. Bigl
我们通过质谱、能量分析和束流剖面测量来表征内置热灯丝宽束离子源的性能。在离子能量分布中，我们检测到不同的峰结构，这可以通过跨离子源的电势和不同的电荷转移过程来解释。根据这些过程的典型横截面，观察到离子种类的能量分布之间的差异。用源获得的总离子电流由放电中的电离率和流向引出栅系统的电流份额决定。源的性能在很大程度上取决于所使用的工艺气体。我们观察到更广泛的能量分布在氧气和氮气比氩气。这种加宽是由放电区域中的空间不均匀性来解释的，并且可以通过适当地设置源参数来减小。离子通量的主要贡献是由直接从p产生的物种造成的。
We characterize the performance of a built‐in hot filament broad beam ion source by mass spectrometry, energy analysis, and beam profile measurements. In the ion energy distribution we detect various peak structures which can be explained by the potential across the ion source and different charge transfer processes. Depending on the typical cross sections for these processes, differences between the energy distributions of the ion species are observed. The total ion current obtained with the source is determined by the ionization rate in the discharge and the current share directed toward the extraction grid system. The performance of the source is strongly dependent on the process gas used. We observe much broader energy distributions in oxygen and nitrogen than in argon. This broadening is explained by spatial inhomogeneities in the discharge region and can be reduced by a suitable setting of the source parameters. The main contribution to the ion flux is caused by species generated directly from the p...