Ion-beam pore opening of porous anodic alumina: The formation of single nanopore and nanopore arrays
Ion-beam pore opening of porous anodic alumina: The formation of single nanopore and nanopore arrays
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DOI：
10.1016/j.matlet.2008.11.007
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发表时间：
2009-02-15
影响因子：
3
通讯作者：
Losic, Dusan
中科院分区：
文献类型：
--
作者：
Lillo, Mickael;Losic, Dusan
Anodized aluminium oxide (AAO) fabricated by electrochemical anodization of aluminium is used as the substrate for focused ion-beam (FIB) fabrication of single nanopore and nanopore arrays. The method is based on the controlled and selective removal of AAO barrier oxide film by FIB milling. FIB process with different milling conditions is applied to open single nanopores (diameter of 60 nm) or circular nanopore arrays with a different number of opened pores on AAO substrate. This process combines a low cost AAO substrate and FIB milling, and offers an economically viable alternative for the fabrication of nanopore devices with controlled dimensions for a range of applications in nanofluidics, molecular separations and biosensing. Crown Copyright (C) 2008 Published by Elsevier B.V. All rights reserved.
