Development of ballistic electron cold cathode by a low-temperature processing of polycrystalline silicon films
Development of ballistic electron cold cathode by a low-temperature processing of polycrystalline silicon films
复制标题
利用多晶硅薄膜低温加工开发弹道电子冷阴极
DOI:
10.1016/s0022-0248(01)02245-x
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发表时间:
2002
影响因子:
1.8
通讯作者:
N. Koshida
中科院分区:
文献类型:
--
作者:
T. Ichihara;Y. Honda;Koichi Aizawa;T. Komoda;N. Koshida