Pulsed‐laser time‐of‐flight atom‐probe field ion microscope

Pulsed‐laser time‐of‐flight atom‐probe field ion microscope
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脉冲激光飞行时间原子探针场离子显微镜

DOI:
10.1063/1.1137193
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发表时间:
1982
影响因子:
1.6
通讯作者:
T. J. Kinkus
T. J. Kinkus
中科院分区:
工程技术4区
文献类型:
--
作者:
T. Tsong;S. B. Mclane;T. J. Kinkus

文献摘要

被引文献

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开发了一种线性脉冲激光飞行时间原子探针。飞行路径长度约为 200 和 425 厘米,质量分辨率可与机械和电气设计更为复杂的能量聚焦飞行时间原子探针相媲美。 Mo、Xe 和 W 的同位素完全分离到质量线的根部。我们还讨论了如何进一步提高脉冲激光原子探针的质量分辨率以及该仪器的用途。
A linear‐type pulsed‐laser time‐of‐flight atom probe has been developed. With a flight path length of ∼200 and ∼425 cm, the mass resolution is comparable to the energy focused time‐of‐flight atom probe of much more elaborate mechanical and electrical design. The isotopes of Mo, Xe, and W are completely separated to the roots of the mass lines. We also discuss how the mass resolution of the pulsed‐laser atom probe can be further improved and where this instrument will be useful.