Development of a coordinate measuring machine (CMM) touch probe using a multi-axis force sensor
Development of a coordinate measuring machine (CMM) touch probe using a multi-axis force sensor
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DOI：
10.1088/0957-0233/17/9/002
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发表时间：
2006-09-01
影响因子：
2.4
通讯作者：
Cho, Nahmgyoo
中科院分区：
文献类型：
--
作者：
Park, Jae-jun;Kwon, Kihwan;Cho, Nahmgyoo
传统的触控触发探头广泛应用于商用三坐标测量机上。然而，这些探头的三坐标测量机有一个系统误差，由于探头尖端的形状和触针的弹性变形，导致与样品的接触压力。本文提出了一种新型的三自由度力传感器触摸探头。根据得到的接触力矢量与探头几何形状之间的关系，可以计算出精确的探头-试样接触点的坐标。利用探针的经验模型计算了接触点的坐标和预行程量。利用该系统，可以成功地估计和补偿由测头与试样接触点的不确定性和预行程引起的测量误差。
Traditional touch trigger probes are widely used on most commercial coordinate measuring machines ( CMMs). However, the CMMs with these probes have a systematic error due to the shape of the probe tip and elastic deformation of the stylus resulting from contact pressure with the specimen. In this paper, a new touch probe with a three degrees-of-freedom force sensor is proposed. From relationships between an obtained contact force vector and the geometric shape of the probe, it is possible to calculate the coordinates of the exact probe-specimen contact points. An empirical model of the probe is applied to calculate the coordinates of the contact points and the amount of pretravel. With the proposed probing system, the measuring error induced by the indeterminateness of the probe-specimen contact point and the pretravel can be estimated and compensated for successfully.