Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development
Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development
复制标题
前沿设备制造的干法工艺的进展和前景：走向智能工艺和虚拟产品开发
DOI：
10.7567/1347-4065/ab163b
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发表时间：
2019
影响因子：
1.5
通讯作者：
et al.,
中科院分区：
文献类型：
--
作者：
Iwase Taku;Koga Kazunori;Ishikawa Kenji;et al.,
