Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique

Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique
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通过简单氧化技术制造的 Ti-TiOx-Pt 金属氧化物金属二极管

DOI:
10.1557/opl.2012.72
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发表时间:
2012
期刊:
MRS Proceedings
影响因子:
--
通讯作者:
D. Wood
D. Wood
中科院分区:
--
文献类型:
--
作者:
L. Dodd;A. Gallant;D. Wood

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这项工作展示了通过简单的氧化工艺,成功生产出具有优异电不对称性的Ti-TiOx-Pt金属-氧化物-金属二极管。用TEM分析验证了氧化层的厚度。较厚的层产生更好的二极管,尽管它们的均匀性较差。这些二极管的传导机制仍在研究中。
This work presents the successful production, via a simple oxidation process, of Ti-TiOx-Pt Metal-Oxide-Metal diodes with excellent electrical asymmetry. TEM analysis has been used to verify the oxide thickness. A thicker layer produces better diodes, although they are of a less uniform nature. The conduction mechanism in these diodes is still under investigation.