Nanofocusing optics for synchrotron radiation made from polycrystalline diamond.
Nanofocusing optics for synchrotron radiation made from polycrystalline diamond.
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DOI：
10.1364/oe.22.007657
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发表时间：
2014-04
期刊：
影响因子：
3.8
通讯作者：
Oliver Fox;L. Alianelli;A. Malik;Ian Pape;Paul W May;Kawal Sawhney
中科院分区：
文献类型：
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作者：
Oliver Fox;L. Alianelli;A. Malik;Ian Pape;Paul W May;Kawal Sawhney
金刚石具有许多极端的特性，使其成为制造纳米聚焦x射线光学器件的理想材料。由金刚石制成的折射透镜能够以高效率聚焦X射线辐射，但不会影响光束的亮度。电子束光刻和硅衬底的深反应离子蚀刻已被用于传递模塑技术中，以制造具有垂直和光滑侧壁的金刚石光学器件。最新一代复合折射透镜在光学结构的质量和均匀性方面有所改善，从而提高了其聚焦能力。描述了两种最新的透镜阵列的同步辐射光束线测试，对应于两种不同的金刚石形貌。使用Diamond Light Source Ltd. B16光束线，使用纳米金刚石透镜阵列和E = 11 keV的光束能量，以及使用微晶金刚石透镜在E = 15 keV时，已经测量了低至210 nm的焦线宽度。与硅折射设计和其他衍射光学器件相比，这种聚焦能力与通过透镜的相对较高的透射率相结合。
Diamond possesses many extreme properties that make it an ideal material for fabricating nanofocusing x-ray optics. Refractive lenses made from diamond are able to focus x-ray radiation with high efficiency but without compromising the brilliance of the beam. Electron-beam lithography and deep reactive-ion etching of silicon substrates have been used in a transfer-molding technique to fabricate diamond optics with vertical and smooth sidewalls. Latest generation compound refractive lenses have seen an improvement in the quality and uniformity of the optical structures, resulting in an increase in their focusing ability. Synchrotron beamline tests of two recent lens arrays, corresponding to two different diamond morphologies, are described. Focal line-widths down to 210 nm, using a nanocrystalline diamond lens array and a beam energy of E = 11 keV, and 230 nm, using a microcrystalline diamond lens at E = 15 keV, have been measured using the Diamond Light Source Ltd. B16 beamline. This focusing prowess is combined with relatively high transmission through the lenses compared with silicon refractive designs and other diffractive optics.