Roughness measurement methodology according to DIN 4768 using optical coherence tomography (OCT)
Roughness measurement methodology according to DIN 4768 using optical coherence tomography (OCT)
复制标题
使用光学相干断层扫描 (OCT) 的粗糙度测量方法符合 DIN 4768
DOI：
--
复制
发表时间：
2009
期刊：
影响因子：
--
通讯作者：
A. Freitas
中科院分区：
文献类型：
--
作者：
M. Amaral;M. P. Raele;J. P. Caly;R. Samad;N. Vieira;A. Freitas
当以传统方式（通过物理接触）测量某种样品的粗糙度时，可能会出现一些问题。例如，软质样品至少会出现两种问题：（a）设备所呈现的数值并不代表样品的粗糙度； (b) 该设备可能对样品造成严重损坏。使用具有 6μm 轴向分辨率（在空气中）和 6μm 横向分辨率的商业型 OCT（Thorlabs Inc.），测量 Ra 标称值为 0.8、1.6、3.2、6.3、12.5、25.0 和 50.0 μm 的粗糙度标准。自制软件分析OCT图像，并自动计算Ra和Rz值。执行此程序是为了验证该方法，比较 OCT 和粗糙度标准值。
Measure roughness in some sort of samples can present several problems when it is done in traditional way (with physical contact). For instance, soft samples will present at least two kinds of problem: (a) the value presented by the equipment not represents the sample roughness; (b) the equipment can perform serious damages to the sample. Using a commercial type OCT (Thorlabs Inc.) with 6μm axial resolution (in air) and 6μm lateral resolution, measurements of roughness standards with Ra nominal values of 0.8, 1.6, 3.2, 6.3, 12.5, 25.0 and 50.0 μm. A homemade software analysis the OCT images, and automatically calculates the Ra and Rz values. This procedure was performed to validate this methodology comparing the OCT and roughness standards values.