Plasmonic Color Filter Array with High Color Purity for CMOS Image Sensors

Plasmonic Color Filter Array with High Color Purity for CMOS Image Sensors
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DOI:
10.3390/s19081750
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发表时间:
2019-04
期刊:
Sensors (Basel, Switzerland)
影响因子:
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通讯作者:
Atsutaka Miyamichi;A. Ono;K. Kagawa;K. Yasutomi;S. Kawahito
Atsutaka Miyamichi;A. Ono;K. Kagawa;K. Yasutomi;S. Kawahito
中科院分区:
其他
文献类型:
--
作者:
Atsutaka Miyamichi;A. Ono;K. Kagawa;K. Yasutomi;S. Kawahito

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我们演示了由同心波纹金属薄膜环组成的等离子体滤色器对标准RGB颜色和互补CMY颜色的多波段滤色。表面等离子体激元共振由周期性的双折射激发,并且耦合的光通过中心亚波长孔径透射。颜色选择性不仅在可见光区域实现,而且在近红外(NIR)区域实现。因此,可以通过等离子体滤色器与传感器的集成来实现可见光和NIR的同时成像。我们调查的透射颜色选择性和色纯度的制造等离子体滤色器阵列的入射角依赖。
We demonstrate the multiband color filtering of a standard RGB color and a complementary CMY color by a plasmonic color filter, composed of concentric corrugated metallic thin film rings. The surface plasmon resonance is excited by the periodic corrugation, and the coupled light is transmitted through the central subwavelength aperture. Color selectivity is achieved not only in the visible but also in the near-infrared (NIR) region. Therefore, simultaneous imaging with visible and NIR can be realized by the integration of plasmonic color filters with sensors. We investigate the angle of incidence dependence of the transmission color selectivity and the color purity of the fabricated plasmonic color filter array.