Depth Profiles of the Fermi Level at an Amorphous-Carbon Nitride/SiO_2/n-type-Si Heterojunction Interface Obtained by Kelvin Probe Force Microscopy

Depth Profiles of the Fermi Level at an Amorphous-Carbon Nitride/SiO_2/n-type-Si Heterojunction Interface Obtained by Kelvin Probe Force Microscopy
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开尔文探针力显微镜获得非晶碳氮化物/SiO_2/n型硅异质结界面费米能级深度分布

DOI:
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发表时间:
2006
期刊:
Diamond and Related Materials 15 (9)
影响因子:
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通讯作者:
Osamu Takai
Osamu Takai
中科院分区:
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文献类型:
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作者:
Takahiro Ishizaki;Nagahiro Saito;Riichiro Ohta;Osamu Takai

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