Target preparation by means of the vibrational motion of particles at one atmosphere
Target preparation by means of the vibrational motion of particles at one atmosphere
复制标题
通过颗粒在一个大气压下的振动运动来制备靶材
DOI：
10.1016/s0168-9002(99)00657-9
复制
发表时间：
1999
影响因子：
1.4
通讯作者：
I. Sugai
中科院分区：
文献类型：
--
作者：
I. Sugai
基于微粒在平行电极间电场中的振动运动，采用新的靶材制备方法，在空气中同一气氛下制备了Pd和Si自支撑薄膜。我们成功地制备了厚度为0.10-0.50 mg/cm2的靶材，电极间距为10 mm，外加电压为10KV。用65 MeVα束流的卢瑟福散射分析了所制备的靶中的杂质。研究发现，杂质的量与所制备的元素有关。
The new target preparation method, which is based on the vibrational motion of microparticles in the electric field between parallel electrodes, has been applied to prepare Pd and Si self-supporting foils at one atmosphere in air. We successfully prepared targets of 0.10–0.50mg/cm2thick with an electrode separation of 10mm and an applied voltage of 10kV. The impurities in the prepared targets were examined by using the Rutherford scattering of a 65MeV α-beam. It was found that the impurity amounts depend on the prepared element.