Effects of Axial Magnetic Field and Faraday Shield on Characteristics of RF Produced Plasma Using Spiral Antenna
Effects of Axial Magnetic Field and Faraday Shield on Characteristics of RF Produced Plasma Using Spiral Antenna
复制标题
轴向磁场和法拉第屏蔽对螺旋天线射频产生等离子体特性的影响
DOI：
10.1143/jjap.35.4503
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发表时间：
1996
影响因子：
1.5
通讯作者：
Y. Kawai
中科院分区：
文献类型：
--
作者：
S. Shinohara;S. Takechi;Y. Kawai
研究了轴向磁场和法拉第屏蔽对螺旋天线射频等离子体性能的影响。研究了等离子体参数的射频功率和填充压力依赖性、天线-等离子体耦合、Ar线强度和空间分布。在有磁场和/或没有法拉第屏蔽的情况下，降低了等离子体引发的阈值输入功率，并且改善了天线-等离子体耦合。此外，提出了一种无碰撞加热机制。随着外加磁场的增加，离子饱和电流增加，并显示出一个峰值的径向轮廓;在低压范围内，它显示出一个几乎平坦的轴向轮廓。
Influences of the axial magnetic field and Faraday shield on the performance of RF produced plasma using a spiral antenna are investigated. The RF power and filling pressure dependences, antenna-plasma coupling, Ar line intensities and spatial profiles of plasma parameters are studied. With the magnetic field and/or without a Faraday shield, the threshold input power for plasma initiation is lowered and the antenna-plasma coupling is improved. In addition, a collisionless heating mechanism is suggested. With the increase in the applied magnetic field, the ion saturation current increases and shows a peaked radial profile; in the low-pressure range it shows a nearly flat axial profile.