Pinning Effect of Fe(ClO) and Ti(ClO) Compounds on Cu Grain Growth in Very Narrow Cu Wires
Pinning Effect of Fe(ClO) and Ti(ClO) Compounds on Cu Grain Growth in Very Narrow Cu Wires
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Fe(ClO) 和 Ti(ClO) 化合物对极窄铜线中铜晶粒生长的钉扎效应
DOI:
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发表时间:
2015
影响因子:
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通讯作者:
Kunihiro Tamahashi,Kishio Hidaka,and Jin Onuki
中科院分区:
文献类型:
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作者:
Takatoshi Nagano;Yashushi Sasajima;Bobuhiro Ishikawa;Kunihiro Tamahashi,Kishio Hidaka,and Jin Onuki