Novel microstructured adaptive X-ray optics

Novel microstructured adaptive X-ray optics
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新型微结构自适应 X 射线光学器件

DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
B. Boonliang
B. Boonliang
中科院分区：
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文献类型：
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作者：
A. Michette;P. Prewett;A. K. Powell;S. Pfauntsch;K. Atkinson;B. Boonliang

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微纳加工技术的发展使得设计和制造微结构光学阵列（MOAs）成为可能。由于在通道几何形状和布局的选择方面具有更大的灵活性，这些提供了比当前掠入射光学器件更好的性能，当前掠入射光学器件限于圆形、正方形或紧密堆积的六边形通道。此外，MOA可以具有内置的自适应性和可控焦距-因此它们可以用作变焦镜头。潜在的应用包括X射线微探测、EUV光刻和共焦X射线显微镜。
Advances in the techniques of micro- and nano-fabrication mean that it is now possible to design and make microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and layout, these offer much better performances than current grazing incidence optics, which are limited to circular, square or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal length - they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography and confocal x-ray microscopy.