Spectroscopic ellipsometer with the smallest measurement spot

Spectroscopic ellipsometer with the smallest measurement spot
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具有最小测量点的光谱椭偏仪

DOI：
10.1117/12.598683
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发表时间：
2005
期刊：
--
影响因子：
--
通讯作者：
Tomohiro Yoshida
Tomohiro Yoshida
中科院分区：
--
文献类型：
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作者：
A. Kinoshita;Fujikazu Kitamura;M. Horie;Tomohiro Yoshida

文献摘要

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随着多层结构和新材料的引入，收缩设计规则降低了薄膜厚度规格，并带来了挑战。薄膜厚度测量是这些必须解决的挑战之一。不仅结构和材料的测量具有挑战性，而且在300 mm晶圆工艺中，需要在小型测试焊盘上进行这些测量，以消除虚拟晶片并节省成本。为满足这些要求，Dainippon Screen Mfg中国光电子股份有限公司研制的RE-3200椭圆偏振光谱仪可以测量光斑尺寸为30微米的多种参数。这款最先进的薄膜厚度测量工具具有独特的设计，可支持光谱椭偏测量、光学干涉测量和单色椭偏测量(可选)。该方法具有长期重复性好、准确度高、测量时间短、COO低等优点。这种简单的光学系统不需要偏振器之间的任何元件，确保了高的光学效率和稳定性。高精度的非球面反射镜是专门为该系统开发的，可以测量设备上的小面积。此外，高对比度偏振器的使用将测量误差降至最低。RE-3200系统也强烈推荐用于散射测量应用。本文将介绍RE-3200的光学设计和性能，包括测量结果。
Shrinking design rules have decreased film thickness specifications and are creating challenges as multi-layer structures and new materials are introduced. Film thickness measurement is one of these challenges that must be addressed. Not only are the structures and materials challenging to measure but in the 300mm wafer process it is required to implement these measurements on small test pads to eliminate dummy wafers and save costs. To meet these requirements, Dainippon Screen Mfg. Co., Ltd. has developed a spectroscopic ellipsometer, RE-3200, which can measure several parameters with a spot size down to 30um. This state-of-the-art film thickness measurement tool has a unique design to support spectroscopic ellipsometry and also optical interferometry and monochromic ellipsometry(optional). The advantages include high long-term repeatability, high accuracy, short measurement time, and low COO. The simple optics does not require any components between polarizers and ensure high optical efficiency and stability. The high-precision aspheric mirrors are developed specifically for this system and allow the measurement of the small areas on the device. In addition, the use of high-contrast polarizers minimizes measurement errors. The RE-3200 system is also strongly recommended for scatterometry applications. In this paper, the optical design and performance of RE-3200 including measurement results will be presented.