Pure-tin microdroplets irradiated with double laser pulses for efficient and minimum-mass extreme-ultraviolet light source production
Pure-tin microdroplets irradiated with double laser pulses for efficient and minimum-mass extreme-ultraviolet light source production
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DOI：
10.1063/1.2948874
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发表时间：
2008-06-16
影响因子：
4
通讯作者：
Mima, Kunioki
中科院分区：
文献类型：
--
作者：
Fujioka, Shinsuke;Shimomura, Masashi;Mima, Kunioki
激光驱动的纯锡微滴膨胀被证明可以产生高效、低碎片的极紫外 (EUV) 光源。预膨胀对于解决最佳激光光斑直径（大约 300 μm）和含有最小质量 Sn 燃料的微滴直径（大约 20 μm）之间的相当大的不匹配是必不可少的，以产生所需的 EUV 辐射能（大约 10 mJ/脉冲）。微滴的爆炸性膨胀是通过使用激光预脉冲实现的，其强度至少为3x10(11)W/cm(2)。用 CO2 激光脉冲照射膨胀的微滴以产生 EUV 光。膨胀微滴的低密度和长尺度长度相结合，使得 EUV 能量转换效率 (4%) 比单 CO2 激光脉冲照射的平面 Sn 靶材获得的能量转换效率 (2.5%) 更高。该方案可用于制作实用的EUV光源系统。
Laser-driven expansion of pure-tin microdroplets was demonstrated to produce an efficient and low-debris extreme-ultraviolet (EUV) light source. The pre-expansion is indispensable for resolving the considerable mismatch between the optimal laser spot diameter (similar to 300 mu m) and the diameter (similar to 20 mu m) of microdroplets containing the minimum-mass Sn fuel for generating the required EUV radiant energy (similar to 10 mJ/pulse). Explosive expansion of microdroplets was attained by using a laser prepulse, whose intensity was at least 3x10(11) W/cm(2). The expanded microdroplet was irradiated with a CO2 laser pulse to generate EUV light. A combination of low density and long-scale length of the expanded microdroplet leads to a higher EUV energy conversion efficiency (4%) than that (2.5%) obtained from planar Sn targets irradiated by a single CO2 laser pulse. This scheme can be used to produce a practical EUV light source system.